Jian-Huei Feng

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods for providing run to run process control using a dynamic tuner
- Patent number 9,213,322
- Issue date Dec 15, 2015
- Western Digital (Fremont), LLC
- Jian-Huei Feng
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods for providing asymmetric run to run control of process para...
- Patent number 9,110,465
- Issue date Aug 18, 2015
- Western Digital (Fremont), LLC
- Jian-Huei Feng
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for aligning wafers within wafer processing equipment
- Patent number 8,500,916
- Issue date Aug 6, 2013
- HGST Netherlands B.V.
- Jian-Huei Feng
- B08 - CLEANING
Information Patent Grant
Copper damascene chemical mechanical polishing (CMP) for thin film...
- Patent number 7,396,768
- Issue date Jul 8, 2008
- Hitachi Global Storage Technologies Netherlands B.V.
- Jian-Huei Feng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gentle chemical mechanical polishing (CMP) liftoff process
- Patent number 7,220,167
- Issue date May 22, 2007
- Hitachi Global Storage Technologies Netherlands B.V.
- Jian-Huei Feng
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Copper damascene chemical mechanical polishing (CMP) for thin film...
- Publication number 20080096389
- Publication date Apr 24, 2008
- Jian-Huei Feng
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Gentle chemical mechanical polishing (CMP) liftoff process
- Publication number 20060154573
- Publication date Jul 13, 2006
- HITACHI GLOBAL STORAGE TECHNOLOGIES
- Jian-Huei Feng
- B24 - GRINDING POLISHING
Information Patent Application
System and method for aligning wafers within wafer processing equip...
- Publication number 20060096612
- Publication date May 11, 2006
- Jian-Huei Feng
- B08 - CLEANING
Information Patent Application
System and method for aligning wafers
- Publication number 20060066333
- Publication date Mar 30, 2006
- Jian-Huei Feng
- G01 - MEASURING TESTING