Jian Zhang

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method of controlling discharge angle and disc...
- Patent number 11,640,911
- Issue date May 2, 2023
- Tokyo Electron Limited
- Tatsuhiro Ueki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,424,141
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method of c...
- Patent number 11,244,838
- Issue date Feb 8, 2022
- Tokyo Electron Limited
- Tatsuhiro Ueki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 9,895,711
- Issue date Feb 20, 2018
- Tokyo Electron Limited
- Jian Zhang
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD OF C...
- Publication number 20220122853
- Publication date Apr 21, 2022
- TOKYO ELECTRON LIMITED
- Tatsuhiro Ueki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190122906
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180076057
- Publication date Mar 15, 2018
- TOKYO ELECTRON LIMITED
- Tatsuhiro Ueki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20160221046
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Jian Zhang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...