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Jiang Zhe
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Shrewsbury, MA, US
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last 30 patents
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Patent Grant
MEMS devices and methods for inhibiting errant motion of MEMS compo...
Patent number
6,900,510
Issue date
May 31, 2005
Advanced Microsensors
Hirokazu Tamura
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MEMS devices and methods for inhibiting errant motion of MEMS compo...
Publication number
20030155841
Publication date
Aug 21, 2003
Hirokazu Tamura
B81 - MICRO-STRUCTURAL TECHNOLOGY