Jianheng Li

Person

Breinigsville, PA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process to reduce plasma induced damage
- Patent number 12,021,152
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Jianheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processes for depositing silicon-containing films using halidosilan...
- Patent number 11,913,112
- Issue date Feb 27, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 11,732,351
- Issue date Aug 22, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process to reduce plasma induced damage
- Patent number 11,670,722
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Jianheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process to reduce plasma induced damage
- Patent number 11,380,801
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Jianheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursors and flowable CVD methods for making low-k films to fill...
- Patent number 11,270,880
- Issue date Mar 8, 2022
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Processes for depositing silicon-containing films using halidosilan...
- Patent number 11,268,190
- Issue date Mar 8, 2022
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bisaminoalkoxysilane compounds and methods for using same to deposi...
- Patent number 11,142,658
- Issue date Oct 12, 2021
- VERSUM MATERIALS US, LLC
- Daniel P. Spence
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 11,104,990
- Issue date Aug 31, 2021
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursors and flowable CVD methods for making low-K films to fill...
- Patent number 11,017,998
- Issue date May 25, 2021
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method and precursors for manufacturing 3D devices
- Patent number 10,985,013
- Issue date Apr 20, 2021
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Chamber liner
- Patent number 10,923,327
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process to reduce plasma induced damage
- Patent number 10,804,408
- Issue date Oct 13, 2020
- Applied Materials, Inc.
- Jianheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for improved silicon nitride passivation films
- Patent number 10,748,759
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Jianheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursors and flowable CVD methods for making low-K films to fill...
- Patent number 10,468,244
- Issue date Nov 5, 2019
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bisaminoalkoxysilane compounds and methods for using same to deposi...
- Patent number 10,421,766
- Issue date Sep 24, 2019
- VERSUM MATERIALS US, LLC
- Daniel P. Spence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkyl-alkoxysilacyclic compounds
- Patent number 10,395,920
- Issue date Aug 27, 2019
- VERSUM MATERIALS US, LLC
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and precursors for manufacturing 3D devices
- Patent number 10,354,860
- Issue date Jul 16, 2019
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier materials for display devices
- Patent number 10,319,862
- Issue date Jun 11, 2019
- VERSUM MATERIALS US, LLC
- Robert Gordon Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for carbon doped silicon contai...
- Patent number 10,145,008
- Issue date Dec 4, 2018
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for deposition of silicon-conta...
- Patent number 10,106,890
- Issue date Oct 23, 2018
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkyl-alkoxysilacyclic compounds
- Patent number 9,922,818
- Issue date Mar 20, 2018
- VERSUM MATERIALS US, LLC
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming non-oxygen containing silicon-based films
- Patent number 9,243,324
- Issue date Jan 26, 2016
- Air Products and Chemicals, Inc.
- Heather Regina Bowen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20240392434
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- JIANHENG LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...
- Publication number 20240191346
- Publication date Jun 13, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS TO REDUCE PLASMA INDUCED DAMAGE
- Publication number 20240088301
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Jianheng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS TO REDUCE PLASMA INDUCED DAMAGE
- Publication number 20220293793
- Publication date Sep 15, 2022
- Applied Materials, Inc.
- Jianheng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Precursors and Flowable CVD Methods for Making Low-K Films to Fill...
- Publication number 20220157601
- Publication date May 19, 2022
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...
- Publication number 20220154331
- Publication date May 19, 2022
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Depositing a Conformal Metal or Metalloid Silicon Nitri...
- Publication number 20210388489
- Publication date Dec 16, 2021
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20210140040
- Publication date May 13, 2021
- VERSUM MATERIALS US, LLC
- JIANHENG LI
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Precursors and Flowable CVD Methods for Making Low-K Films to Fill...
- Publication number 20210043446
- Publication date Feb 11, 2021
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
PROCESS TO REDUCE PLASMA INDUCED DAMAGE
- Publication number 20200395485
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Jianheng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR IMPROVED SILICON NITRIDE PASSIVATION FILMS
- Publication number 20200227249
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Jianheng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT CONDUCTIVE SPACER FOR PLASMA PROCESSING CHAMBER
- Publication number 20200098549
- Publication date Mar 26, 2020
- Applied Materials, Inc.
- Beom Soo PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors And Flowable CVD Methods For Making Low-K Films To Fill...
- Publication number 20200058496
- Publication date Feb 20, 2020
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER LINER
- Publication number 20200043706
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Jianheng LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...
- Publication number 20200032389
- Publication date Jan 30, 2020
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Siloxane Compositions and Methods for Using the Compositions to Dep...
- Publication number 20190382886
- Publication date Dec 19, 2019
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Bisaminoalkoxysilane Compounds And Methods For Using Same To Deposi...
- Publication number 20190359637
- Publication date Nov 28, 2019
- VERSUM MATERIALS US, LLC
- Daniel P. Spence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Precursors for Manufacturing 3D Devices
- Publication number 20190304775
- Publication date Oct 3, 2019
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C07 - ORGANIC CHEMISTRY
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20190292658
- Publication date Sep 26, 2019
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS TO REDUCE PLASMA INDUCED DAMAGE
- Publication number 20190115475
- Publication date Apr 18, 2019
- Applied Materials, Inc.
- Jianheng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20190055645
- Publication date Feb 21, 2019
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors and Flowable CVD Methods for Making Low-K Films to Fill...
- Publication number 20180315598
- Publication date Nov 1, 2018
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Method and Composition for Providing Pore Sealing Layer on Porous L...
- Publication number 20180277360
- Publication date Sep 27, 2018
- Versum Materials US, LLC
- Jianheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING A CONFORMAL METAL OR METALLOID SILICON NITRI...
- Publication number 20180245215
- Publication date Aug 30, 2018
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Alkyl-Alkoxysilacyclic Compounds And Methods For Depositing Films U...
- Publication number 20180233355
- Publication date Aug 16, 2018
- VERSUM MATERIALS US, LLC
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors and Flowable CVD Methods for Making Low-K Films to Fill...
- Publication number 20180061636
- Publication date Mar 1, 2018
- Versum Materials US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAI...
- Publication number 20180023192
- Publication date Jan 25, 2018
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20170335449
- Publication date Nov 23, 2017
- VERSUM MATERIALS US, LLC
- Jianheng LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BISAMINOALKOXYSILANE COMPOUNDS AND METHODS FOR USING SAME TO DEPOSI...
- Publication number 20160237100
- Publication date Aug 18, 2016
- Air Products and Chemicals, Inc.
- Daniel P. Spence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND PRECURSORS FOR MANUFACTURING 3D DEVICES
- Publication number 20160225616
- Publication date Aug 4, 2016
- Air Products and Chemicals, Inc.
- Jianheng Li
- C07 - ORGANIC CHEMISTRY

Jianheng Li

Person

Patents Grantslast 30 patents

Process to reduce plasma induced damage

Processes for depositing silicon-containing films using halidosilan...

Methods for depositing a conformal metal or metalloid silicon nitri...

Process to reduce plasma induced damage

Process to reduce plasma induced damage

Precursors and flowable CVD methods for making low-k films to fill...

Processes for depositing silicon-containing films using halidosilan...

Bisaminoalkoxysilane compounds and methods for using same to deposi...

Methods for depositing a conformal metal or metalloid silicon nitri...

Precursors and flowable CVD methods for making low-K films to fill...

Method and precursors for manufacturing 3D devices

Chamber liner

Process to reduce plasma induced damage

Methods for improved silicon nitride passivation films

Precursors and flowable CVD methods for making low-K films to fill...

Bisaminoalkoxysilane compounds and methods for using same to deposi...

Alkyl-alkoxysilacyclic compounds

Method and precursors for manufacturing 3D devices

Barrier materials for display devices

Compositions and methods using same for carbon doped silicon contai...

Compositions and methods using same for deposition of silicon-conta...

Alkyl-alkoxysilacyclic compounds

Methods of forming non-oxygen containing silicon-based films

Patents Applicationslast 30 patents

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...

PROCESS TO REDUCE PLASMA INDUCED DAMAGE

PROCESS TO REDUCE PLASMA INDUCED DAMAGE

Precursors and Flowable CVD Methods for Making Low-K Films to Fill...

HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...

Methods for Depositing a Conformal Metal or Metalloid Silicon Nitri...

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

Precursors and Flowable CVD Methods for Making Low-K Films to Fill...

PROCESS TO REDUCE PLASMA INDUCED DAMAGE

METHODS FOR IMPROVED SILICON NITRIDE PASSIVATION FILMS

HEAT CONDUCTIVE SPACER FOR PLASMA PROCESSING CHAMBER

Precursors And Flowable CVD Methods For Making Low-K Films To Fill...

CHAMBER LINER

HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...

Siloxane Compositions and Methods for Using the Compositions to Dep...

Bisaminoalkoxysilane Compounds And Methods For Using Same To Deposi...

Method and Precursors for Manufacturing 3D Devices

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

PROCESS TO REDUCE PLASMA INDUCED DAMAGE

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

Precursors and Flowable CVD Methods for Making Low-K Films to Fill...

Method and Composition for Providing Pore Sealing Layer on Porous L...

METHODS FOR DEPOSITING A CONFORMAL METAL OR METALLOID SILICON NITRI...

Alkyl-Alkoxysilacyclic Compounds And Methods For Depositing Films U...

Precursors and Flowable CVD Methods for Making Low-K Films to Fill...

COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAI...

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

BISAMINOALKOXYSILANE COMPOUNDS AND METHODS FOR USING SAME TO DEPOSI...

METHOD AND PRECURSORS FOR MANUFACTURING 3D DEVICES