Jianhua ZHOU

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Flat head units for heavy load alignment
- Patent number 12,140,168
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Hassan Yousefi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High density plasma enhanced process chamber
- Patent number 12,080,516
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of tuning to improve plasma stability
- Patent number 11,929,236
- Issue date Mar 12, 2024
- Applied Materials, Inc.
- Shouqian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 11,898,249
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 11,613,812
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for ALD processes
- Patent number 11,306,393
- Issue date Apr 19, 2022
- Applied Materials, Inc.
- Jeffrey A. Kho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma corrision resistive heater for high temperature processing
- Patent number 11,299,805
- Issue date Apr 12, 2022
- Applied Materials, Inc.
- Abdul Aziz Khaja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual temperature heater
- Patent number 11,133,210
- Issue date Sep 28, 2021
- Applied Materials, Inc.
- Dale R. Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of removal of sharp corners from diffuser plate
- Patent number 11,123,837
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Ilyoung Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 11,031,262
- Issue date Jun 8, 2021
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone pedestal for plasma processing
- Patent number 10,971,389
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Xing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic heater and esc with enhanced wafer edge performance
- Patent number 10,950,477
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Xing Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater pedestal assembly for wide range temperature control
- Patent number 10,910,238
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Kaushik Alayavalli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bottom and side plasma tuning having closed loop control
- Patent number 10,910,227
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas diffuser mounting plate for reduced particle generation
- Patent number 10,883,174
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- Allen K. Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of achieving high input impedance without usin...
- Patent number 10,879,041
- Issue date Dec 29, 2020
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-zone heater for plasma processing
- Patent number 10,811,301
- Issue date Oct 20, 2020
- Applied Materials, Inc.
- Xing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 10,793,954
- Issue date Oct 6, 2020
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measurement in multi-zone heater
- Patent number 10,720,349
- Issue date Jul 21, 2020
- Applied Materials, Inc.
- Dale R. Du Bois
- G01 - MEASURING TESTING
Information Patent Grant
Alumina layer formation on aluminum surface to protect aluminum parts
- Patent number 10,711,350
- Issue date Jul 14, 2020
- APPLIED MATERICAL, INC.
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas flow guide design for uniform flow distribution and efficient p...
- Patent number 10,697,062
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic heater with enhanced RF power delivery
- Patent number 10,692,703
- Issue date Jun 23, 2020
- Applied Materials, Inc.
- Xing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 10,636,684
- Issue date Apr 28, 2020
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Critical methodology in vacuum chambers to determine gap and leveli...
- Patent number 10,599,043
- Issue date Mar 24, 2020
- Applied Materials, Inc.
- Hiroyuki Ogiso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlling temperature in substrate processing systems
- Patent number 10,544,508
- Issue date Jan 28, 2020
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-zone heater for plasma processing
- Patent number 10,497,606
- Issue date Dec 3, 2019
- Applied Materials, Inc.
- Xing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PEALD apparatus to enable rapid cycling
- Patent number 10,480,077
- Issue date Nov 19, 2019
- Applied Materials, Inc.
- Dale R. Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for radical-based deposition of dielectric films
- Patent number 10,480,074
- Issue date Nov 19, 2019
- Applied Materials, Inc.
- Jianhua Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High impedance RF filter for heater with impedance tuning device
- Patent number 10,450,653
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Jian J. Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 10,403,515
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...
- Publication number 20240234105
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...
- Publication number 20240136160
- Publication date Apr 25, 2024
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYMMETRIC ANTENNA ARRAYS FOR HIGH DENSITY PLASMA ENHANCED PROCESS C...
- Publication number 20240087847
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20230193466
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH DENSITY PLASMA ENHANCED PROCESS CHAMBER
- Publication number 20230162947
- Publication date May 25, 2023
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ANTENNA UNIT FOR LARGE AREA INDUCTIVELY COUPLED PLASMA PROCES...
- Publication number 20230162948
- Publication date May 25, 2023
- Applied Materials, Inc.
- Shouqian SHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF TUNING TO IMPROVE PLASMA STABILITY
- Publication number 20220270858
- Publication date Aug 25, 2022
- Applied Materials, Inc.
- Shouqian SHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLAT HEAD UNITS FOR HEAVY LOAD ALIGNMENT
- Publication number 20220228616
- Publication date Jul 21, 2022
- Applied Materials, Inc.
- Hassan Yousefi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES
- Publication number 20210296144
- Publication date Sep 23, 2021
- Applied Materials, Inc.
- Xing LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS OF ACHIEVING HIGH INPUT IMPEDANCE WITHOUT USIN...
- Publication number 20210111000
- Publication date Apr 15, 2021
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20200399756
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20200234982
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DIFFUSER MOUNTING PLATE FOR REDUCED PARTICLE GENERATION
- Publication number 20200165726
- Publication date May 28, 2020
- Applied Materials, Inc.
- Allen K. LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL-ZONE HEATER FOR PLASMA PROCESSING
- Publication number 20200051848
- Publication date Feb 13, 2020
- Applied Materials, Inc.
- Xing LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR ALD PROCESSES
- Publication number 20200040455
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Jeffrey A. KHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW GUIDE DESIGN FOR UNIFORM FLOW DISTRIBUTION AND EFFICIENT P...
- Publication number 20200017971
- Publication date Jan 16, 2020
- Applied Materials, Inc.
- Chien-Teh KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE
- Publication number 20200010957
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Jian J. CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SOLUTION FOR RESOLVING CGT MURA ISSUE
- Publication number 20190382891
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Shouqian SHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20190371630
- Publication date Dec 5, 2019
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL TEMPERATURE HEATER
- Publication number 20190304825
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Dale R. Du BOIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA CORRISION RESISTIVE HEATER FOR HIGH TEMPERATURE PROCESSING
- Publication number 20190203350
- Publication date Jul 4, 2019
- Applied Materials, Inc.
- Abdul Aziz KHAJA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MEASUREMENT IN MULTI-ZONE HEATER
- Publication number 20190206706
- Publication date Jul 4, 2019
- Applied Materials, Inc.
- Dale R. Du Bois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REMOVAL OF SHARP CORNERS FROM DIFFUSER PLATE
- Publication number 20190193233
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- Ilyoung HONG
- B24 - GRINDING POLISHING
Information Patent Application
HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE
- Publication number 20190177848
- Publication date Jun 13, 2019
- Applied Materials, Inc.
- Jian J. CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOTTOM AND SIDE PLASMA TUNING HAVING CLOSED LOOP CONTROL
- Publication number 20190080916
- Publication date Mar 14, 2019
- Applied Materials, Inc.
- Juan Carlos ROCHA-ALVAREZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
- Publication number 20190035665
- Publication date Jan 31, 2019
- Applied Materials, Inc.
- XING LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20180258535
- Publication date Sep 13, 2018
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER PEDESTAL ASSEMBLY FOR WIDE RANGE TEMPERATURE CONTROL
- Publication number 20180082866
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Kaushik ALAYAVALLI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR RADICAL-BASED DEPOSITION OF DIELECTRIC FILMS
- Publication number 20180080125
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Jianhua ZHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20180066364
- Publication date Mar 8, 2018
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Jianhua ZHOU

Person

Patents Grantslast 30 patents

Flat head units for heavy load alignment

High density plasma enhanced process chamber

Methods of tuning to improve plasma stability

PECVD process

PECVD process

Methods and apparatus for ALD processes

Plasma corrision resistive heater for high temperature processing

Dual temperature heater

Method of removal of sharp corners from diffuser plate

Loadlock integrated bevel etcher system

Multi-zone pedestal for plasma processing

Ceramic heater and esc with enhanced wafer edge performance

Heater pedestal assembly for wide range temperature control

Bottom and side plasma tuning having closed loop control

Gas diffuser mounting plate for reduced particle generation

Method and apparatus of achieving high input impedance without usin...

Dual-zone heater for plasma processing

PECVD process

Temperature measurement in multi-zone heater

Alumina layer formation on aluminum surface to protect aluminum parts

Gas flow guide design for uniform flow distribution and efficient p...

Ceramic heater with enhanced RF power delivery

Loadlock integrated bevel etcher system

Critical methodology in vacuum chambers to determine gap and leveli...

Controlling temperature in substrate processing systems

Dual-zone heater for plasma processing

PEALD apparatus to enable rapid cycling

Apparatus for radical-based deposition of dielectric films

High impedance RF filter for heater with impedance tuning device

Loadlock integrated bevel etcher system

Patents Applicationslast 30 patents

IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...

IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...

SYMMETRIC ANTENNA ARRAYS FOR HIGH DENSITY PLASMA ENHANCED PROCESS C...

PECVD PROCESS

HIGH DENSITY PLASMA ENHANCED PROCESS CHAMBER

MULTI-ANTENNA UNIT FOR LARGE AREA INDUCTIVELY COUPLED PLASMA PROCES...

METHODS OF TUNING TO IMPROVE PLASMA STABILITY

FLAT HEAD UNITS FOR HEAVY LOAD ALIGNMENT

SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES

METHOD AND APPARATUS OF ACHIEVING HIGH INPUT IMPEDANCE WITHOUT USIN...

PECVD PROCESS

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM

GAS DIFFUSER MOUNTING PLATE FOR REDUCED PARTICLE GENERATION

DUAL-ZONE HEATER FOR PLASMA PROCESSING

METHODS AND APPARATUS FOR ALD PROCESSES

GAS FLOW GUIDE DESIGN FOR UNIFORM FLOW DISTRIBUTION AND EFFICIENT P...

HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE

METHOD AND SOLUTION FOR RESOLVING CGT MURA ISSUE

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM

DUAL TEMPERATURE HEATER

PLASMA CORRISION RESISTIVE HEATER FOR HIGH TEMPERATURE PROCESSING

TEMPERATURE MEASUREMENT IN MULTI-ZONE HEATER

METHOD OF REMOVAL OF SHARP CORNERS FROM DIFFUSER PLATE

HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE

BOTTOM AND SIDE PLASMA TUNING HAVING CLOSED LOOP CONTROL

MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING

PECVD PROCESS

HEATER PEDESTAL ASSEMBLY FOR WIDE RANGE TEMPERATURE CONTROL

APPARATUS FOR RADICAL-BASED DEPOSITION OF DIELECTRIC FILMS

PECVD PROCESS