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Jianhui Chen
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Refractive focusing element for spectroscopic ellipsometry
Patent number
6,940,596
Issue date
Sep 6, 2005
Therma-Wave, Inc.
Craig Uhrich
G01 - MEASURING TESTING
Information
Patent Grant
Coaxial illumination system
Patent number
6,862,090
Issue date
Mar 1, 2005
Therma-Wave, Inc.
Jianhui Chen
G01 - MEASURING TESTING
Information
Patent Grant
Small spot spectroscopic ellipsometer with refractive focusing
Patent number
6,829,049
Issue date
Dec 7, 2004
Therma-Wave, Inc.
Craig Uhrich
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Refractive focusing element for spectroscopic ellipsometry
Publication number
20050046842
Publication date
Mar 3, 2005
Craig Uhrich
G02 - OPTICS
Information
Patent Application
Coaxial illumination system
Publication number
20030030799
Publication date
Feb 13, 2003
Jianhui Chen
G01 - MEASURING TESTING