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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Simulation of lithography using multiple-sampling of angular distri...
Patent number
11,506,984
Issue date
Nov 22, 2022
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern placement error aware optimization
Patent number
10,386,727
Issue date
Aug 20, 2019
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SIMULATION OF LITHOGRAPHY USING MULTIPLE-SAMPLING OF ANGULAR DISTRI...
Publication number
20180120709
Publication date
May 3, 2018
ASML NETHERLANDS B.V.
Duan-Fu Stephen HSU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN PLACEMENT ERROR AWARE OPTIMIZATION
Publication number
20170082927
Publication date
Mar 23, 2017
ASML NETHERLANDS B.V.
Duan-Fu Stephen HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY