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Patents Grants
last 30 patents
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Patent Grant
Scanning interference lithographic system
Patent number
12,189,300
Issue date
Jan 7, 2025
Tsinghua University; Beijing U-Precision Tech Co., Ltd.
Leijie Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Plane grating calibration system
Patent number
11,940,349
Issue date
Mar 26, 2024
Tsinghua University
Leijie Wang
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...
Publication number
20240319619
Publication date
Sep 26, 2024
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM
Publication number
20240264534
Publication date
Aug 8, 2024
TSINGHUA UNIVERSITY
Leijie WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PLANE GRATING CALIBRATION SYSTEM
Publication number
20220260452
Publication date
Aug 18, 2022
TSINGHUA UNIVERSITY
Leijie WANG
G01 - MEASURING TESTING