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Shanghai, CN
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last 30 patents
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Patent Grant
Dynamic determination of metal film thickness from sheet resistance...
Patent number
10,663,279
Issue date
May 26, 2020
KLA-Tencor Corporation
Xianghua Liu
G01 - MEASURING TESTING
Information
Patent Grant
Dynamic determination of metal film thickness from sheet resistance...
Patent number
10,598,477
Issue date
Mar 24, 2020
KLA-Tencor Corporation
Xianghua Liu
G01 - MEASURING TESTING
Information
Patent Grant
System and method for nondestructively measuring concentration and...
Patent number
8,804,106
Issue date
Aug 12, 2014
KLA-Tencor Corporation
NanChang Zhu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Dynamic Determination of Metal Film Thickness from Sheet Resistance...
Publication number
20170227347
Publication date
Aug 10, 2017
KLA-Tencor Corporation
Xianghua Liu
G01 - MEASURING TESTING
Information
Patent Application
Dynamic Determination of Metal Film Thickness from Sheet Resistance...
Publication number
20170227348
Publication date
Aug 10, 2017
KLA-Tencor Corporation
Xianghua Liu
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR NONDESTRUCTIVELY MEASURING CONCENTRATION AND...
Publication number
20130003050
Publication date
Jan 3, 2013
KLA-Tencor Corporation
NanChang Zhu
G01 - MEASURING TESTING