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Jianpeng Wang
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Shanghai, CN
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last 30 patents
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Patent Grant
Methods of forming MEMS device
Patent number
9,315,379
Issue date
Apr 19, 2016
Shanghai Huahong Grace Semiconductor Manufacturing Corporation
Zhenxing Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
METHODS OF FORMING MEMS DEVICE
Publication number
20150259198
Publication date
Sep 17, 2015
Shanghai Huahong Grace Semiconductor Manufacturing Corporation
Zhenxing Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY