Jianyao Liu

Person

  • Shanghai, CN

Patents Grantslast 30 patents

  • Information Patent Grant

    Overlay measurement method and apparatus

    • Patent number 10,679,881
    • Issue date Jun 9, 2020
    • Semiconductor Manufacturing International (Shanghai) Corporation
    • Qiang Wu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    OVERLAY MEASUREMENT METHOD AND APPARATUS

    • Publication number 20180122669
    • Publication date May 3, 2018
    • Semiconductor Manufacturing International (Shanghai) Corporation
    • QIANG WU
    • H01 - BASIC ELECTRIC ELEMENTS