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Shanghai, CN
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last 30 patents
Information
Patent Grant
Edge exposure device and method
Patent number
10,782,614
Issue date
Sep 22, 2020
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Jinguo Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate pre-alignment method
Patent number
10,416,578
Issue date
Sep 17, 2019
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Xiwen Zhou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pre-alignment device and method for wafer
Patent number
10,276,417
Issue date
Apr 30, 2019
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Gang Wang
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
EDGE EXPOSURE DEVICE AND METHOD
Publication number
20200089119
Publication date
Mar 19, 2020
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Jinguo YANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PRE-ALIGNMENT DEVICE AND METHOD FOR WAFER
Publication number
20180151400
Publication date
May 31, 2018
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Gang WANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PRE-ALIGNMENT METHOD
Publication number
20180046097
Publication date
Feb 15, 2018
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Xiwen ZHOU
H01 - BASIC ELECTRIC ELEMENTS