Jiazhen Zheng

Follow

Person

Whye Lane, SG

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for determination of the end point in chemical...
- Patent number 5,667,629
- Issue date Sep 16, 1997
- Chartered Semiconductor Manufactuing Pte, Ltd.
- Yang Pan
- B24 - GRINDING POLISHING