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Jie-Fei Zheng
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Dual wavelength dual interferometer with combiner-splitter
Patent number
9,651,359
Issue date
May 16, 2017
KLA-Tencor Corporation
Dengpeng Chen
G01 - MEASURING TESTING
Information
Patent Grant
Method for reducing wafer shape and thickness measurement errors re...
Patent number
9,121,684
Issue date
Sep 1, 2015
KLA-Tencor Corporation
Shouhong Tang
G01 - MEASURING TESTING
Information
Patent Grant
Focusing detector of an interferometry system
Patent number
8,902,429
Issue date
Dec 2, 2014
KLA-Tencor Corporation
Jie-Fei Zheng
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Dual Wavelength Dual Interferometer with Combiner-Splitter
Publication number
20160146590
Publication date
May 26, 2016
KLA-Tencor Corporation
Dengpeng Chen
G01 - MEASURING TESTING
Information
Patent Application
Method for Reducing Wafer Shape and Thickness Measurement Errors Re...
Publication number
20130182262
Publication date
Jul 18, 2013
KLA-Tencor Corporation
Shouhong Tang
G01 - MEASURING TESTING