Jie Liang

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Radio frequency electrode assembly for plasma processing apparatus,...
- Patent number 11,875,970
- Issue date Jan 16, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Longbao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively coupled plasma etching apparatus
- Patent number 11,670,515
- Issue date Jun 6, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift pin assembly, an electrostatic chuck and a processing apparatu...
- Patent number 11,626,314
- Issue date Apr 11, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively coupled plasma etching apparatus
- Patent number 11,515,168
- Issue date Nov 29, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively coupled plasma etching apparatus
- Patent number 11,373,843
- Issue date Jun 28, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor for ultra-high aspect ratio etching and etching meth...
- Patent number 11,189,496
- Issue date Nov 30, 2021
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Gerald Zheyao Yin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
STATOR ASSEMBLY FOR USE IN MOTOR AND ASSEMBLY METHOD THEREFOR, AND...
- Publication number 20240128823
- Publication date Apr 18, 2024
- SCHAEFFLER TECHNOLOGIES AG & CO. KG
- Zhihao Li
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
ELECTROSTATIC CHUCK, METHOD OF MANUFACTURING ELECTROSTATIC CHUCK, A...
- Publication number 20210118716
- Publication date Apr 22, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Rubin YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA REACTOR FOR ULTRA-HIGH ASPECT RATIO ETCHING AND ETCHING METH...
- Publication number 20200251345
- Publication date Aug 6, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Gerald Zheyao Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radio Frequency Electrode Assembly for Plasma Processing Apparatus,...
- Publication number 20200194231
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Longbao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitively Coupled Plasma Etching Apparatus
- Publication number 20200194276
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitively Coupled Plasma Etching Apparatus
- Publication number 20200194230
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitively Coupled Plasma Etching Apparatus
- Publication number 20200194275
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PIN ASSEMBLY, AN ELECTROSTATIC CHUCK AND A PROCESSING APPARATU...
- Publication number 20200083087
- Publication date Mar 12, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Radio frequency electrode assembly for plasma processing apparatus,...

Capacitively coupled plasma etching apparatus

Lift pin assembly, an electrostatic chuck and a processing apparatu...

Capacitively coupled plasma etching apparatus

Capacitively coupled plasma etching apparatus

Plasma reactor for ultra-high aspect ratio etching and etching meth...

Patents Applicationslast 30 patents

STATOR ASSEMBLY FOR USE IN MOTOR AND ASSEMBLY METHOD THEREFOR, AND...

ELECTROSTATIC CHUCK, METHOD OF MANUFACTURING ELECTROSTATIC CHUCK, A...

PLASMA REACTOR FOR ULTRA-HIGH ASPECT RATIO ETCHING AND ETCHING METH...

Radio Frequency Electrode Assembly for Plasma Processing Apparatus,...

Capacitively Coupled Plasma Etching Apparatus

Capacitively Coupled Plasma Etching Apparatus

Capacitively Coupled Plasma Etching Apparatus

LIFT PIN ASSEMBLY, AN ELECTROSTATIC CHUCK AND A PROCESSING APPARATU...