Jiho Uh

Person

Seoul, KR

People

Patents Grantslast 30 patents

Information Patent Grant
PH monitoring systems having sensor modules
- Patent number 12,360,072
- Issue date Jul 15, 2025
- Samsung Electronics Co., Ltd.
- Sunhwan Park
- G01 - MEASURING TESTING
Information Patent Grant
Valve structure and substrate processing apparatus including the same
- Patent number 11,948,814
- Issue date Apr 2, 2024
- Samsung Electronics Co., Ltd.
- Kangmin Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,600,511
- Issue date Mar 7, 2023
- Samsung Electronics Co., Ltd.
- Kihong Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chuck, substrate processing apparatus including the same and...
- Patent number 11,476,151
- Issue date Oct 18, 2022
- Samsung Electronics Co., Ltd.
- Byounghoon Ji
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MASS FLOW CONTROLLER, FLOW CONTROL METHOD USING THE SAME, AND SUBST...
- Publication number 20250216872
- Publication date Jul 3, 2025
- Samsung Electronics Co., Ltd.
- Seunghun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JUNCTION TEMPERATURE ESTIMATION DEVICE AND PLASMA GENERATING SYSTEM...
- Publication number 20250106975
- Publication date Mar 27, 2025
- Samsung Electronics Co., Ltd.
- Donghoon PARK
- G01 - MEASURING TESTING
Information Patent Application
PRESSURE GAUGE ZERO POINT CALIBRATION METHOD
- Publication number 20250076144
- Publication date Mar 6, 2025
- Samsung Electronics Co., Ltd.
- Seunghun KIM
- G01 - MEASURING TESTING
Information Patent Application
MASS FLOW CONTROLLER AND ZERO POINT CALIBRATION METHOD USING THE SAME
- Publication number 20240370043
- Publication date Nov 7, 2024
- Samsung Electronics Co., Ltd.
- Seunghun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20240213053
- Publication date Jun 27, 2024
- Samsung Electronics Co., Ltd.
- Kangmin Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASS FLOW CONTROL DEVICE AND ZERO POINT CALIBRATION METHOD FOR THE...
- Publication number 20240183702
- Publication date Jun 6, 2024
- Samsung Electronics Co., Ltd.
- Seunghun Kim
- G01 - MEASURING TESTING
Information Patent Application
RF GENERATOR WITH CARBONIZATION PREVENTION SYSTEM
- Publication number 20230360881
- Publication date Nov 9, 2023
- Samsung Electronics Co., Ltd.
- Kwangyoung Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PH MONITORING SYSTEMS HAVING SENSOR MODULES
- Publication number 20230296550
- Publication date Sep 21, 2023
- Samsung Electronics Co., Ltd.
- Sunhwan PARK
- G01 - MEASURING TESTING
Information Patent Application
VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20230130512
- Publication date Apr 27, 2023
- Samsung Electronics Co., Ltd.
- Kangmin Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210296153
- Publication date Sep 23, 2021
- Samsung Electronics Co., Ltd.
- Kihong CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHUCK, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME AND...
- Publication number 20210074574
- Publication date Mar 11, 2021
- Samsung Electronics Co., Ltd.
- Byounghoon Ji
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

PH monitoring systems having sensor modules

Valve structure and substrate processing apparatus including the same

Substrate processing apparatus

Vacuum chuck, substrate processing apparatus including the same and...

Patents Applicationslast 30 patents

MASS FLOW CONTROLLER, FLOW CONTROL METHOD USING THE SAME, AND SUBST...

JUNCTION TEMPERATURE ESTIMATION DEVICE AND PLASMA GENERATING SYSTEM...

PRESSURE GAUGE ZERO POINT CALIBRATION METHOD

MASS FLOW CONTROLLER AND ZERO POINT CALIBRATION METHOD USING THE SAME

VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

MASS FLOW CONTROL DEVICE AND ZERO POINT CALIBRATION METHOD FOR THE...

RF GENERATOR WITH CARBONIZATION PREVENTION SYSTEM

PH MONITORING SYSTEMS HAVING SENSOR MODULES

VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

SUBSTRATE PROCESSING APPARATUS

VACUUM CHUCK, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME AND...