JIHOON NA

Follow

Person

BUCHEON-SI, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for generating extreme ultraviolet (EUV), method of manuf...
- Patent number 11,729,896
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Jihoon Na
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet (EUV) mask inspection system, a load-lock chamb...
- Patent number 11,531,277
- Issue date Dec 20, 2022
- Samsung Electronics Co., Ltd.
- Jihoon Na
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EUV PHOTOMASK INSPECTION APPARATUS
- Publication number 20230194845
- Publication date Jun 22, 2023
- Samsung Electronics Co., Ltd.
- Garam Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET (EUV) MASK INSPECTION SYSTEM, A LOAD-LOCK CHAMB...
- Publication number 20220283519
- Publication date Sep 8, 2022
- Samsung Electronics Co., Ltd.
- Jihoon Na
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR GENERATING EXTREME ULTRAVIOLET (EUV), METHOD OF MANUF...
- Publication number 20220167492
- Publication date May 26, 2022
- Research & Business Foundation Sungkyunkwan University
- JIHOON NA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR