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Jill S. Becker

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  • Cambridge, MA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    VAPOR DEPOSITION SYSTEMS AND METHODS
    • Publication number 20170159177
    • Publication date Jun 8, 2017
    • Ultratech, Inc.
    • Douwe J. Monsma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ATOMIC LAYER DEPOSITION SYSTEM AND METHOD
    • Publication number 20170016114
    • Publication date Jan 19, 2017
    • Ultratech, Inc.
    • Jill S Becker
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
    • Publication number 20160268121
    • Publication date Sep 15, 2016
    • President and Fellows of Harvard College
    • Roy Gerald GORDON
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Atomic Layer Deposition Head
    • Publication number 20160115596
    • Publication date Apr 28, 2016
    • Ultratech, Inc.
    • Michael J. Sershen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
    • Publication number 20160111276
    • Publication date Apr 21, 2016
    • President and Fellows of Harvard College
    • Roy Gerald GORDON
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
    • Publication number 20160087066
    • Publication date Mar 24, 2016
    • President and Fellows of Harvard College
    • Roy Gerald GORDON
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    REACTION CHAMBER WITH REMOVABLE LINER
    • Publication number 20160002781
    • Publication date Jan 7, 2016
    • Ultratech, Inc.
    • Roger R. Coutu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR HIGH-VELOCITY AND ATMOSPHERIC-PRESSURE ATOMIC LAYER DEPO...
    • Publication number 20150275363
    • Publication date Oct 1, 2015
    • Ultratech, Inc.
    • Michael J. Sershen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vapor Deposition of Metal Oxides, Silicates and Phosphates, and Sil...
    • Publication number 20150118395
    • Publication date Apr 30, 2015
    • President and Fellows of Harvard College
    • Roy Gerald GORDON
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
    • Publication number 20130122328
    • Publication date May 16, 2013
    • President and Fellows of Harvard College
    • Roy Gerald GORDON
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD COATING SYSTEM
    • Publication number 20120141676
    • Publication date Jun 7, 2012
    • Cambridge NanoTech Inc.
    • Michael J. Sershen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR DEPOSITION SYSTEMS AND METHODS
    • Publication number 20120070581
    • Publication date Mar 22, 2012
    • Cambridge Nano Tech Inc.
    • Douwe J. Monsma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD SYSTEMS AND METHODS
    • Publication number 20120064245
    • Publication date Mar 15, 2012
    • Cambridge NanoTech Inc.
    • Roger R. Coutu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
    • Publication number 20120028478
    • Publication date Feb 2, 2012
    • President and Fellows of Harvard College
    • Roy G. Gordon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR PRECURSOR DELIVERY
    • Publication number 20110311726
    • Publication date Dec 22, 2011
    • Cambridge NanoTech Inc.
    • Guo Liu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR DEPOSITION OF SILICON DIOXIDE NANOLAMINATES
    • Publication number 20110281417
    • Publication date Nov 17, 2011
    • Roy G. GORDON
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REACTION CHAMBER WITH REMOVABLE LINER
    • Publication number 20100247763
    • Publication date Sep 30, 2010
    • Cambridge NanoTech Inc.
    • Roger R. Coutu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ATOMIC LAYER DEPOSITION SYSTEM AND METHOD
    • Publication number 20100183825
    • Publication date Jul 22, 2010
    • Cambridge NanoTech Inc.
    • Jill S. Becker
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM AND METHOD FOR THIN FILM DEPOSITION
    • Publication number 20100166955
    • Publication date Jul 1, 2010
    • Cambridge NanoTech Inc.
    • Jill S. Becker
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vapor deposition of tungsten nitride
    • Publication number 20060125099
    • Publication date Jun 15, 2006
    • President and Fellows of Harvard College
    • Roy G. Gordon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vapor deposition systems and methods
    • Publication number 20060021573
    • Publication date Feb 2, 2006
    • Cambridge NanoTech Inc.
    • Douwe J. Monsma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vapor deposition of metal oxides, silicates and phosphates, and sil...
    • Publication number 20050277780
    • Publication date Dec 15, 2005
    • President and Fellows of Harvard College
    • Roy G. Gordon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vapor deposition of silicon dioxide nanolaminates
    • Publication number 20050112282
    • Publication date May 26, 2005
    • President and Fellows of Harvard College
    • Roy G. Gordon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vapor deposition of metal oxides, silicates and phosphates, and sil...
    • Publication number 20040043149
    • Publication date Mar 4, 2004
    • Roy G. Gordon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...