Membership
Tour
Register
Log in
Jin Fujihara
Follow
Person
Nirasaki City, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate stage, substrate processing apparatus and substrate proce...
Patent number
9,153,465
Issue date
Oct 6, 2015
Tokyo Electron Limited
Masaya Odagiri
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
8,741,065
Issue date
Jun 3, 2014
Tokyo Electron Limited
Masaya Odagiri
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing method and resist pattern modifying method
Patent number
8,394,720
Issue date
Mar 12, 2013
Tokyo Electron Limited
Jin Fujihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and apparatus, control program for performing...
Patent number
7,416,676
Issue date
Aug 26, 2008
Tokyo Electron Limited
Jin Fujihara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20150113826
Publication date
Apr 30, 2015
TOKYO ELECTRON LIMITED
Masaya Odagiri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE STAGE, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCE...
Publication number
20120000612
Publication date
Jan 5, 2012
TOKYO ELECTRON LIMITED
Masaya ODAGIRI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20120000629
Publication date
Jan 5, 2012
TOKYO ELECTRON LIMITED
Masaya ODAGIRI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING METHOD AND RESIST PATTERN MODIFYING METHOD
Publication number
20100055911
Publication date
Mar 4, 2010
TOKYO ELECTRON LIMITED
Jin Fujihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma etching method and apparatus, control program for performing...
Publication number
20060180571
Publication date
Aug 17, 2006
TOKYO ELECTRON LIMITED
Jin Fujihara
H01 - BASIC ELECTRIC ELEMENTS