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Jin KUDO

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Etching process method
    • Patent number 10,692,729
    • Issue date Jun 23, 2020
    • Tokyo Electron Limited
    • Jin Kudo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching process method
    • Patent number 10,600,654
    • Issue date Mar 24, 2020
    • Tokyo Electron Limited
    • Maju Tomura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching method and plasma processing apparatus
    • Patent number 9,147,580
    • Issue date Sep 29, 2015
    • Tokyo Electron Limited
    • Takayuki Katsunuma
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING PROCESS METHOD
    • Publication number 20170372916
    • Publication date Dec 28, 2017
    • TOKYO ELECTRON LIMITED
    • Jin KUDO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING PROCESS METHOD
    • Publication number 20170358460
    • Publication date Dec 14, 2017
    • TOKYO ELECTRON LIMITED
    • Maju TOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20130267094
    • Publication date Oct 10, 2013
    • TOKYO ELECTRON LIMITED
    • Takayuki KATSUNUMA
    • H01 - BASIC ELECTRIC ELEMENTS