Jin Kunika

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TOKYO, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate etching apparatus and substrate analysis method
- Patent number 9,741,627
- Issue date Aug 22, 2017
- IAS, INC
- Katsuhiko Kawabata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE ETCHING APPARATUS AND SUBSTRATE ANALYSIS METHOD
- Publication number 20150357249
- Publication date Dec 10, 2015
- IAS Inc.
- Katsuhiko Kawabata
- H01 - BASIC ELECTRIC ELEMENTS