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Patents Grants
last 30 patents
Information
Patent Grant
Alignment method and alignment system thereof
Patent number
10,048,603
Issue date
Aug 14, 2018
Semiconductor Manufacturing International (Shanghai) Corporation
Qiang Zhang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Interconnection structure, fabricating method thereof, and exposure...
Patent number
9,646,865
Issue date
May 9, 2017
Semiconductor Manufacturing International (Beijing) Corporation
Qiang Zhang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, photolithographical reticles and exposure metho...
Patent number
9,606,451
Issue date
Mar 28, 2017
Semiconductor Manufacturing International Corporation
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cylindrical reticle system, exposure apparatus and exposure method
Patent number
9,298,103
Issue date
Mar 29, 2016
Semiconductor Manufacturing International (Shanghai) Corporation
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure device and exposure method
Patent number
9,223,229
Issue date
Dec 29, 2015
Semiconductor Manufacturing International Corp
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography machine and scanning and exposing method thereof
Patent number
9,134,624
Issue date
Sep 15, 2015
Semiconductor Manufacturing International Corp
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
ALIGNMENT METHOD AND ALIGNMENT SYSTEM THEREOF
Publication number
20170329241
Publication date
Nov 16, 2017
Semiconductor Manufacturing International (Shanghai) Corporation
Qiang ZHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTERCONNECTION STRUCTURE, FABRICATING METHOD THEREOF, AND EXPOSURE...
Publication number
20170133256
Publication date
May 11, 2017
Semiconductor Manufacturing International (Beijing) Corpor
QIANG ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE APPARATUS, PHOTOLITHOGRAPHICAL RETICLES AND EXPOSURE METHO...
Publication number
20150205215
Publication date
Jul 23, 2015
Semiconductor Manufacturing International (Shanghai) Corporation
QIANG WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CYLINDRICAL RETICLE SYSTEM, EXPOSURE APPARATUS AND EXPOSURE METHOD
Publication number
20140253893
Publication date
Sep 11, 2014
Semiconductor Manufacturing International (Shanghai) Corporation
QIANG WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE DEVICE AND EXPOSURE METHOD
Publication number
20140063480
Publication date
Mar 6, 2014
SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
Qiang WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY MACHINE AND SCANNING AND EXPOSING METHOD THEREOF
Publication number
20130169946
Publication date
Jul 4, 2013
SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
Qiang WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY