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Jing Luo
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Lexington, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
MEMS capping method and apparatus
Patent number
6,893,574
Issue date
May 17, 2005
Lawrence E. Felton
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and device for protecting micro electromechanical systems st...
Patent number
6,759,273
Issue date
Jul 6, 2004
Analog Devices, Inc.
Lawrence E. Felton
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming a cover cap for semiconductor wafer devices
Patent number
6,352,935
Issue date
Mar 5, 2002
Analog Devices, Inc.
David J. Collins
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MEMS capping method and apparatus
Publication number
20030075794
Publication date
Apr 24, 2003
Lawrence E. Felton
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and device for protecting micro electromechanical systems st...
Publication number
20020094662
Publication date
Jul 18, 2002
Lawrence E. Felton
B81 - MICRO-STRUCTURAL TECHNOLOGY