Jing Pan

Follow

Person

Somerville, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
In-situ thickness and refractive index monitoring and control syste...
- Patent number 6,646,753
- Issue date Nov 11, 2003
- Unaxis, USA, Inc.
- Jian Zhang
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
In-situ thickness and refractive index monitoring and control syste...
- Publication number 20020075486
- Publication date Jun 20, 2002
- Jian Zhang
- G01 - MEASURING TESTING