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last 30 patents
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Patent Grant
Magnetron drive mechanism, magnetron assembly and reaction chamber
Patent number
11,282,682
Issue date
Mar 22, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qing She
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND MIXING INLET DEVICE
Publication number
20240183032
Publication date
Jun 6, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jingfeng WEI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20230162998
Publication date
May 25, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jingfeng WEI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETRON DRIVE MECHANISM, MAGNETRON ASSEMBLY AND REACTION CHAMBER
Publication number
20200203135
Publication date
Jun 25, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qing SHE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...