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Jinggao Li
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Fairfield, CT, US
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,081,311
Issue date
Jul 14, 2015
ASML Netherlands B.V.
Herman Vogel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, an illumination system, a projection system...
Patent number
8,810,769
Issue date
Aug 19, 2014
ASML Netherlands B.V.
Jeroen Gerard Gosen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120249983
Publication date
Oct 4, 2012
ASML NETHERLANDS B.V.
Herman Vogel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, AN ILLUMINATION SYSTEM, A PROJECTION SYSTEM...
Publication number
20110228239
Publication date
Sep 22, 2011
ASML NETHERLANDS B.V.
Jeroen Gerard GOSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY