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Shanghai, CN
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last 30 patents
Information
Patent Grant
Adjusting device and adjusting method for exposure device
Patent number
10,197,919
Issue date
Feb 5, 2019
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Jinglu Sun
G02 - OPTICS
Information
Patent Grant
Exposure device
Patent number
10,197,921
Issue date
Feb 5, 2019
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Jinglu Sun
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE DEVICE
Publication number
20180157177
Publication date
Jun 7, 2018
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Jinglu SUN
G02 - OPTICS
Information
Patent Application
ADJUSTING DEVICE AND ADJUSTING METHOD FOR EXPOSURE DEVICE
Publication number
20170322493
Publication date
Nov 9, 2017
Jinglu SUN
G02 - OPTICS