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Shanghai, CN
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last 30 patents
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Patent Grant
Previous layer nuisance reduction through oblique illumination
Patent number
10,818,005
Issue date
Oct 27, 2020
KLA-Tencor Corp.
Jingshan Zhong
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
PREVIOUS LAYER NUISANCE REDUCTION THROUGH OBLIQUE ILLUMINATION
Publication number
20190279357
Publication date
Sep 12, 2019
KLA-Tencor Corporation
Jingshan Zhong
G06 - COMPUTING CALCULATING COUNTING