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Jingyi Xiong
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for simultaneous tilt and height control of a sub...
Patent number
9,810,619
Issue date
Nov 7, 2017
KLA-Tencor Corporation
Zhongping Cai
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for high speed height control of a substrate surf...
Patent number
9,097,645
Issue date
Aug 4, 2015
KLA-Tencor Corporation
Zhongping Cai
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Method and System for High Speed Height Control of a Substrate Surf...
Publication number
20150055141
Publication date
Feb 26, 2015
KLA-Tencor Corporation
Zhongping Cai
G01 - MEASURING TESTING
Information
Patent Application
Method and System for Tilt and Height Control of a Substrate Surfac...
Publication number
20140071457
Publication date
Mar 13, 2014
KLA-Tencor Corporation
Zhongping Cai
G01 - MEASURING TESTING