Jinlong Zhao

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Capacitively coupled plasma etching apparatus
- Patent number 11,670,515
- Issue date Jun 6, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively coupled plasma etching apparatus
- Patent number 11,515,168
- Issue date Nov 29, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively coupled plasma etching apparatus
- Patent number 11,373,843
- Issue date Jun 28, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Capacitively Coupled Plasma Etching Apparatus
- Publication number 20200194276
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitively Coupled Plasma Etching Apparatus
- Publication number 20200194230
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitively Coupled Plasma Etching Apparatus
- Publication number 20200194275
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS