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Patents Grants
last 30 patents
Information
Patent Grant
Liner, reaction chamber and semiconductor processing equipment
Patent number
12,106,934
Issue date
Oct 1, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jinrong Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and semiconductor equipment
Patent number
11,282,735
Issue date
Mar 22, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Quanyu Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition apparatus and physical vapor deposition chamber
Patent number
10,984,994
Issue date
Apr 20, 2021
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jun Zhang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
OLED display substrate and manufacturing method thereof, OLED displ...
Patent number
10,439,011
Issue date
Oct 8, 2019
BOE Technology Group Co., Ltd.
Shuo Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Flexible display motherboard and manufacturing method of flexible d...
Patent number
10,211,238
Issue date
Feb 19, 2019
BOE Technology Group Co., Ltd.
Jinrong Zhao
B32 - LAYERED PRODUCTS
Information
Patent Grant
Method of operating semiconductor manufacturing apparatus and semic...
Patent number
10,170,285
Issue date
Jan 1, 2019
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jinrong Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for plasma treatment and method of operating the apparatus
Patent number
9,899,194
Issue date
Feb 20, 2018
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jinrong Zhao
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
COIL STRUCTURE FOR GENERATING PLASMA AND SEMICONDUCTOR EQUIPMENT
Publication number
20240339296
Publication date
Oct 10, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT INCLUDING MULTIPLE RADIO FREQUENCY (RF) ELECTRODES
Publication number
20240321560
Publication date
Sep 26, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yulin PENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COIL STRUCTURE AND PLASMA PROCESSING APPARATUS
Publication number
20230260751
Publication date
Aug 17, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINER, REACTION CHAMBER AND SEMICONDUCTOR PROCESSING EQUIPMENT
Publication number
20210193434
Publication date
Jun 24, 2021
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR EQUIPMENT
Publication number
20200312692
Publication date
Oct 1, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Quanyu SHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OLED DISPLAY SUBSTRATE AND MANUFACTURING METHOD THEREOF, OLED DISPL...
Publication number
20180286933
Publication date
Oct 4, 2018
BOE TECHNOLOGY GROUP CO., LTD.
Shuo TANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION APPARATUS AND PHYSICAL VAPOR DEPOSITION CHAMBER
Publication number
20180247799
Publication date
Aug 30, 2018
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jun ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF OPERATING SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMIC...
Publication number
20180158656
Publication date
Jun 7, 2018
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLEXIBLE DISPLAY MOTHERBOARD AND MANUFACTURING METHOD OF FLEXIBLE D...
Publication number
20170373100
Publication date
Dec 28, 2017
BOE TECHNOLOGY GROUP CO., LTD.
Jinrong ZHAO
B32 - LAYERED PRODUCTS
Information
Patent Application
APPARATUS FOR PLASMA TREATMENT AND METHOD OF OPERATING THE APPARATUS
Publication number
20170301523
Publication date
Oct 19, 2017
BEIJING NMC CO., LTD
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS