Jinsu Lee

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
CVD method and device for forming silicon-containing insulation film
- Patent number 7,125,812
- Issue date Oct 24, 2006
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Cvd method and device for forming silicon-containing insulation film
- Publication number 20050095770
- Publication date May 5, 2005
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...