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Yamanashi, JP
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last 30 patents
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Patent Grant
Method for forming boron-based film, formation apparatus
Patent number
11,615,957
Issue date
Mar 28, 2023
Tokyo Electron Limited
Hirokazu Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD FOR FORMING BORON-BASED FILM, FORMATION APPARATUS
Publication number
20210090888
Publication date
Mar 25, 2021
TOKYO ELECTRON LIMITED
Hirokazu UEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BORON-BASED FILM FORMING METHOD AND APPARATUS
Publication number
20190301019
Publication date
Oct 3, 2019
TOKYO ELECTRON LIMITED
Yoshimasa WATANABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...