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Shenzhen, CN
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Patents Grants
last 30 patents
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Patent Grant
Instant tuning method for accelerating resist and etch model calibr...
Patent number
11,314,172
Issue date
Apr 26, 2022
ASML Netherlands B.V.
Hongfei Shi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
APPARATUS AND METHOD FOR SELECTING HIGH QUALITY IMAGES FROM RAW IMA...
Publication number
20230298158
Publication date
Sep 21, 2023
ASML NETHERLANDS B.V.
Jiao HUANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS FOR IMPROVING PROCESS BASED CONTOUR INFORMATION OF STRUCTUR...
Publication number
20220299881
Publication date
Sep 22, 2022
ASML NETHERLANDS B.V.
Yunan ZHENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INSTANT TUNING METHOD FOR ACCELERATING RESIST AND ETCH MODEL CALIBR...
Publication number
20210048751
Publication date
Feb 18, 2021
ASML NETHERLANDS B.V.
Hongfei SHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY