Jiro Inoue

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Particle detection method, particle detection device and particle d...
- Patent number 10,113,948
- Issue date Oct 30, 2018
- The University of Tokyo
- Takanori Ichiki
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,846,371
- Issue date Dec 19, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,268,237
- Issue date Feb 23, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,235,139
- Issue date Jan 12, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,019,467
- Issue date Apr 28, 2015
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 8,384,880
- Issue date Feb 26, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 8,208,117
- Issue date Jun 26, 2012
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 7,483,119
- Issue date Jan 27, 2009
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage unit and exposure apparatus
- Patent number 6,788,393
- Issue date Sep 7, 2004
- Nikon Corporation
- Jiro Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position transducer and exposure apparatus with same
- Patent number 6,535,272
- Issue date Mar 18, 2003
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 6,384,898
- Issue date May 7, 2002
- Nikon Corporation
- Jiro Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method preheating a mask before exposing; a...
- Patent number 6,342,941
- Issue date Jan 29, 2002
- Nikon Corporation
- Masahiro Nei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20170329234
- Publication date Nov 16, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE DETECTION METHOD, PARTICLE DETECTION DEVICE AND PARTICLE D...
- Publication number 20170219477
- Publication date Aug 3, 2017
- THE UNIVERSITY OF TOKYO
- Takanori ICHIKI
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20150301457
- Publication date Oct 22, 2015
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20130141703
- Publication date Jun 6, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20130141701
- Publication date Jun 6, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20090015816
- Publication date Jan 15, 2009
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20090015808
- Publication date Jan 15, 2009
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Step Measuring Device and Apparatus, and Exposure Method and Apparatus
- Publication number 20070229791
- Publication date Oct 4, 2007
- Nikon Corporation
- Jiro Inoue
- G01 - MEASURING TESTING
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20060227312
- Publication date Oct 12, 2006
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20060139614
- Publication date Jun 29, 2006
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage unit and exposure apparatus
- Publication number 20020063856
- Publication date May 30, 2002
- Nikon Corporation
- Jiro Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position transducer and exposure apparatus with same
- Publication number 20010046037
- Publication date Nov 29, 2001
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position transducer and exposure apparatus with same
- Publication number 20010026357
- Publication date Oct 4, 2001
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Particle detection method, particle detection device and particle d...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Stage unit and exposure apparatus

Position transducer and exposure apparatus with same

Projection exposure apparatus

Exposure apparatus and method preheating a mask before exposing; a...

Patents Applicationslast 30 patents

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

PARTICLE DETECTION METHOD, PARTICLE DETECTION DEVICE AND PARTICLE D...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Step Measuring Device and Apparatus, and Exposure Method and Apparatus

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Stage unit and exposure apparatus

Position transducer and exposure apparatus with same

Position transducer and exposure apparatus with same