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Ryugasaki, JP
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last 30 patents
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Patent Grant
Circuit pattern inspection apparatus
Patent number
7,696,487
Issue date
Apr 13, 2010
Hitachi High-Technologies Corporation
Koichi Hayakawa
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Circuit pattern inspection apparatus
Publication number
20070114397
Publication date
May 24, 2007
Koichi Hayakawa
G01 - MEASURING TESTING