Jiro Katsuki

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Patents Grantslast 30 patents

Information Patent Grant
Method of measuring nitrogen concentration, method of forming silic...
- Patent number 7,842,621
- Issue date Nov 30, 2010
- Tokyo Electron Limited
- Jiro Katsuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160236244
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Hiroyuki TAKAHASHI
- B08 - CLEANING
Information Patent Application
METHOD OF MEASURING NITROGEN CONTENT, METHOD OF FORMING SILICON OXY...
- Publication number 20090253221
- Publication date Oct 8, 2009
- TOKYO ELECTRON LIMITED
- Jiro Katsuki
- H01 - BASIC ELECTRIC ELEMENTS