Jisoo SUH

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 10,103,011
- Issue date Oct 16, 2018
- Tokyo Electron Limited
- Hiroki Kishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200267826
- Publication date Aug 20, 2020
- TOKYO ELECTRON LIMITED
- Daisuke KAWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200144090
- Publication date May 7, 2020
- TOKYO ELECTRON LIMITED
- Toshiya Tsukahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20170178872
- Publication date Jun 22, 2017
- TOKYO ELECTRON LIMITED
- Hiroki KISHI
- H01 - BASIC ELECTRIC ELEMENTS