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Jitae PARK
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Suwon-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Method of monitoring a semiconductor device fabrication process and...
Patent number
11,605,567
Issue date
Mar 14, 2023
Samsung Electronics Co., Ltd.
Jitae Park
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
PLASMA MONITORING SYSTEM AND METHOD OF MONITORING PLASMA
Publication number
20240274419
Publication date
Aug 15, 2024
Samsung Electronics Co., Ltd.
Kwangho LEE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF MONITORING A SEMICONDUCTOR DEVICE FABRICATION PROCESS AND...
Publication number
20220068728
Publication date
Mar 3, 2022
Samsung Electronics Co., Ltd.
Jitae PARK
H01 - BASIC ELECTRIC ELEMENTS