Jiun-Yu Lai

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Waltham, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical polishing of copper-oxide damascene structures
- Patent number 6,667,239
- Issue date Dec 23, 2003
- ASML US, Inc.
- Nanaji Saka
- B24 - GRINDING POLISHING
Information Patent Grant
Method of chemical mechanical polishing
- Patent number 6,458,013
- Issue date Oct 1, 2002
- ASML US, Inc.
- Nannaji Saka
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Chemical mechanical polishing of copper-oxide damascene structures
- Publication number 20030082904
- Publication date May 1, 2003
- ASML US, Inc.
- Nanaji Saka
- B24 - GRINDING POLISHING