Joachim Heinitz

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Arrangement for the illumination of a substrate with a plurality of...
- Patent number 8,148,702
- Issue date Apr 3, 2012
- Vistec Electron Beam GmbH
- Hans-Joachim Doering
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-beam modulator for a particle beam and use of the multi-beam...
- Patent number 7,741,620
- Issue date Jun 22, 2010
- Vistec Electron Beam GmbH
- Hans-Joachim Doering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for imaging a multiple particle beam on a substrate
- Patent number 7,332,730
- Issue date Feb 19, 2008
- Leica Microsystems Lithography GmbH
- Joachim Heinitz
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Arrangement for the Illumination of a Substrate with a Plurality of...
- Publication number 20100148087
- Publication date Jun 17, 2010
- VISTEC ELECTRON BEAM GMBH
- Hans-Joachim Doering
- B82 - NANO-TECHNOLOGY
Information Patent Application
Multi-Beam Modulator For a Particle Beam and Use of the Multi-Beam...
- Publication number 20080128638
- Publication date Jun 5, 2008
- Hans-Joachim Doering
- B82 - NANO-TECHNOLOGY
Information Patent Application
Device and method for imaging a multiple particle beam on a substrate
- Publication number 20060102853
- Publication date May 18, 2006
- Leica Microsystems Lithography GmbH
- Joachim Heinitz
- G01 - MEASURING TESTING