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Joachim Pokorny
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Hufingen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Device and method for processing substrates
Patent number
6,805,754
Issue date
Oct 19, 2004
Steag Micro Tech GmbH
Joachim Pokorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Facility for treating objects in a process tank
Patent number
6,523,552
Issue date
Feb 25, 2003
STEAG MicroTech GmbH
Joachim Pokorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for processing substrates
Patent number
6,488,987
Issue date
Dec 3, 2002
STEAG MicroTech GmbH
Joachim Pokorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluid heater
Patent number
6,205,292
Issue date
Mar 20, 2001
STEAG MicroTech GmbH
Joachim Pokorny
F24 - HEATING RANGES VENTILATING
Patents Applications
last 30 patents
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Patent Application
Substrate holder
Publication number
20030019744
Publication date
Jan 30, 2003
Joachim Pokorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FACILITY FOR TREATING OBJECTS IN A PROCESS TANK
Publication number
20010008142
Publication date
Jul 19, 2001
JOACHIM POKORNY
H01 - BASIC ELECTRIC ELEMENTS