Joachim Schroeder

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Mask inspection system for inspecting lithography masks
- Patent number 10,054,426
- Issue date Aug 21, 2018
- Carl Zeiss SMT GmbH
- Jochen Hetzler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for flushing at least one internal space of an objective
- Patent number 6,825,914
- Issue date Nov 30, 2004
- Carl Zeiss SMT AG
- Joachim Schroeder
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MASK INSPECTION SYSTEM FOR INSPECTING LITHOGRAPHY MASKS
- Publication number 20160123724
- Publication date May 5, 2016
- Carl Zeiss SMT GMBH
- Jochen Hetzler
- G01 - MEASURING TESTING
Information Patent Application
System for flushing at least one internal space of an objective
- Publication number 20020155384
- Publication date Oct 24, 2002
- Carl-Zeiss-Stiftung trading as Carl Zeiss
- Joachim Schroeder
- G02 - OPTICS