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Joachim Schulz
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Gerlingen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Arrangement for monitoring an optical element, laser source and euv...
Patent number
11,322,902
Issue date
May 3, 2022
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Elongating a travel path of a light beam by an optical delay device
Patent number
10,739,572
Issue date
Aug 11, 2020
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
G01 - MEASURING TESTING
Information
Patent Grant
Amplifying pulsed laser radiation for EUV radiation production
Patent number
10,186,827
Issue date
Jan 22, 2019
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Monitoring laser beams
Patent number
10,044,167
Issue date
Aug 7, 2018
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Amplifying pulsed laser radiation for EUV radiation production
Patent number
10,027,083
Issue date
Jul 17, 2018
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
EUV radiation generating device including a beam influencing optica...
Patent number
9,642,235
Issue date
May 2, 2017
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for amplifying a laser beam
Patent number
9,306,367
Issue date
Apr 5, 2016
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
EUV excitation light source with a laser beam source and a beam gui...
Patent number
9,129,717
Issue date
Sep 8, 2015
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Martin Lambert
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Device and method for laser processing
Patent number
8,946,586
Issue date
Feb 3, 2015
Trumpf Laser- und Systemtechnik GmbH
Martin Bea
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Monitoring a temperature and/or temperature related parameters of a...
Patent number
8,434,938
Issue date
May 7, 2013
Trumpf Laser- und Systemtechnik GmbH
Joachim Schulz
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND DEVICE FOR GENERATING LASER PULSES
Publication number
20240255767
Publication date
Aug 1, 2024
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim SCHULZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARRANGEMENT FOR MONITORING AN OPTICAL ELEMENT, LASER SOURCE AND EUV...
Publication number
20210351554
Publication date
Nov 11, 2021
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Elongating a Travel Path of a Light Beam by an Optical Delay Device
Publication number
20170160527
Publication date
Jun 8, 2017
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
G02 - OPTICS
Information
Patent Application
Amplifying Pulsed Laser Radiation for EUV Radiation Production
Publication number
20170149202
Publication date
May 25, 2017
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Monitoring Laser Beams
Publication number
20170085054
Publication date
Mar 23, 2017
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV Radiation Generating Device Including a Beam Influencing Optica...
Publication number
20160135275
Publication date
May 12, 2016
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV excitation light source with a laser beam source and a beam gui...
Publication number
20130327963
Publication date
Dec 12, 2013
TRUMPF Laser - und Systemtechnik GmbH
Martin Lambert
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Device for Amplifying a Laser Beam
Publication number
20130272327
Publication date
Oct 17, 2013
TRUMPF Laser - und Systemtechnik GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and Method for Laser Processing
Publication number
20100206857
Publication date
Aug 19, 2010
TRUMPF Laser - und Systemtechnik GmbH
Martin Bea
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Monitoring a temperature and/or temperature related parameters of a...
Publication number
20100135356
Publication date
Jun 3, 2010
TRUMPF Laser - und Systemtechnik GmbH
Joachim Schulz
G02 - OPTICS