Joachim Welte

Person

Darmstadt, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for determining an effect of one or more pixel...
- Patent number 11,914,289
- Issue date Feb 27, 2024
- Carl Zeiss SMS Ltd.
- Joachim Welte
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for processing a microstructured component
- Patent number 11,487,211
- Issue date Nov 1, 2022
- Carl Zeiss SMT GmbH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for compensating defects of a mask blank
- Patent number 11,385,539
- Issue date Jul 12, 2022
- Carl Zeiss SMS Ltd.
- Joachim Welte
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for determining positions of a plurality of pi...
- Patent number 11,366,383
- Issue date Jun 21, 2022
- Carl Zeiss SMS Ltd.
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for performing an aerial image simulation of a...
- Patent number 11,366,382
- Issue date Jun 21, 2022
- Carl Zeiss SMT GmbH
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining a wavefront of a massive parti...
- Patent number 11,355,311
- Issue date Jun 7, 2022
- Carl Zeiss SMT GmbH
- Joachim Welte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system and method for correcting mask defects using the system
- Patent number 11,249,294
- Issue date Feb 15, 2022
- Carl Zeiss SMT GmbH
- Markus Seesselberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for correcting the critical dimension uniformity of a photom...
- Patent number 10,578,975
- Issue date Mar 3, 2020
- Carl Zeiss SMT GmbH
- Thomas Thaler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A LITHOGRAPHIC MASK
- Publication number 20230113702
- Publication date Apr 13, 2023
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SETTING A SIDE WALL ANGLE OF A PATTERN ELE...
- Publication number 20230109566
- Publication date Apr 6, 2023
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PERFORMING AN AERIAL IMAGE SIMULATION OF A...
- Publication number 20210263406
- Publication date Aug 26, 2021
- Carl Zeiss SMT GMBH
- Vladimir Dmitriev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICE AND METHOD FOR PROCESSING A MICROSTRUCTURED COMPONENT
- Publication number 20210173310
- Publication date Jun 10, 2021
- Carl Zeiss SMT GMBH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING AN EFFECT OF ONE OR MORE PIXEL...
- Publication number 20210124259
- Publication date Apr 29, 2021
- Carl Zeiss SMS Ltd.
- Joachim Welte
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING A WAVEFRONT OF A MASSIVE PARTI...
- Publication number 20200312613
- Publication date Oct 1, 2020
- Carl Zeiss SMT GMBH
- Joachim Welte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR COMPENSATING DEFECTS OF A MASK BLANK
- Publication number 20200159111
- Publication date May 21, 2020
- Carl Zeiss SMS Ltd.
- Joachim Welte
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING POSITIONS OF A PLURALITY OF PI...
- Publication number 20200124959
- Publication date Apr 23, 2020
- Carl Zeiss SMS Ltd.
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM AND METHOD FOR CORRECTING MASK DEFECTS USING THE SYSTEM
- Publication number 20190170991
- Publication date Jun 6, 2019
- Carl Zeiss SMT GMBH
- Markus Seesselberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Correcting the Critical Dimension Uniformity of a Photom...
- Publication number 20190107783
- Publication date Apr 11, 2019
- Carl Zeiss SMT GMBH
- Thomas Thaler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Joachim Welte

Person

Patents Grantslast 30 patents

Method and apparatus for determining an effect of one or more pixel...

Device and method for processing a microstructured component

Method and apparatus for compensating defects of a mask blank

Method and apparatus for determining positions of a plurality of pi...

Method and apparatus for performing an aerial image simulation of a...

Method and apparatus for determining a wavefront of a massive parti...

Optical system and method for correcting mask defects using the system

Method for correcting the critical dimension uniformity of a photom...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR PROCESSING A LITHOGRAPHIC MASK

METHOD AND APPARATUS FOR SETTING A SIDE WALL ANGLE OF A PATTERN ELE...

METHOD AND APPARATUS FOR PERFORMING AN AERIAL IMAGE SIMULATION OF A...

DEVICE AND METHOD FOR PROCESSING A MICROSTRUCTURED COMPONENT

METHOD AND APPARATUS FOR DETERMINING AN EFFECT OF ONE OR MORE PIXEL...

METHOD AND APPARATUS FOR DETERMINING A WAVEFRONT OF A MASSIVE PARTI...

METHOD AND APPARATUS FOR COMPENSATING DEFECTS OF A MASK BLANK

METHOD AND APPARATUS FOR DETERMINING POSITIONS OF A PLURALITY OF PI...

OPTICAL SYSTEM AND METHOD FOR CORRECTING MASK DEFECTS USING THE SYSTEM

Method for Correcting the Critical Dimension Uniformity of a Photom...