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Joan Sudbury-Holtschlag
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Auburn, MI, US
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last 30 patents
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Patent Grant
Lithography processes using phase change compositions
Patent number
8,147,742
Issue date
Apr 3, 2012
Dow Corning Corporation
Wei Chen
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
Lithography Processes Using Phase Change Compositions
Publication number
20070290387
Publication date
Dec 20, 2007
Wei Chen
B82 - NANO-TECHNOLOGY