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Joan Williams Casey
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West Roxbury, MA, US
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last 30 patents
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Patent Application
PHOTOLITHOGRAPHY MASK REPAIR
Publication number
20090111036
Publication date
Apr 30, 2009
FEI Company
Diane K. Stewart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Electron beam processing for mask repair
Publication number
20040226814
Publication date
Nov 18, 2004
Diane K. Stewart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photolithography mask repair
Publication number
20040151991
Publication date
Aug 5, 2004
Diane K. Stewart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY