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Joanna WU
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Redwood City, CA, US
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last 30 patents
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Patent Grant
Replaceable and/or collapsible edge ring assemblies for plasma shea...
Patent number
11,798,789
Issue date
Oct 24, 2023
Lam Research Corporation
Alejandro Sanchez
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEA...
Publication number
20240038504
Publication date
Feb 1, 2024
LAM RESEARCH CORPORATION
Alejandro SANCHEZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATED PROCESS MODULE RING POSITIONING AND REPLACEMENT
Publication number
20220122878
Publication date
Apr 21, 2022
LAM RESEARCH CORPORATION
Joanna Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEA...
Publication number
20200395195
Publication date
Dec 17, 2020
LAM RESEARCH CORPORATION
Alejandro SANCHEZ
H01 - BASIC ELECTRIC ELEMENTS