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Jochen Haeussler
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Hermaringen, DE
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Patents Grants
last 30 patents
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Patent Grant
Lithographic projection objective
Patent number
10,042,265
Issue date
Aug 7, 2018
Carl Zeiss SMT GmbH
Olaf Rogalsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection objective
Patent number
9,494,868
Issue date
Nov 15, 2016
Carl Zeiss SMT GmbH
Olaf Rogalsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection objective
Patent number
8,605,253
Issue date
Dec 10, 2013
Carl Zeiss SMT GmbH
Olaf Rogalsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC PROJECTION OBJECTIVE
Publication number
20190025709
Publication date
Jan 24, 2019
Carl Zeiss SMT GMBH
Olaf Rogalsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC PROJECTION OBJECTIVE
Publication number
20170031247
Publication date
Feb 2, 2017
Carl Zeiss SMT GMBH
Olaf Rogalsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC PROJECTION OBJECTIVE
Publication number
20140078482
Publication date
Mar 20, 2014
Carl Zeiss SMT GMBH
Olaf Rogalsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC PROJECTION OBJECTIVE
Publication number
20090153829
Publication date
Jun 18, 2009
Carl Zeiss SMT AG
Olaf Rogalsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY