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Jochen Klais
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Radebeul, DE
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last 30 patents
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Patent Grant
Method for reducing resist poisoning during patterning of silicon n...
Patent number
7,550,396
Issue date
Jun 23, 2009
Advanced Micro Devices, Inc.
Kai Frohberg
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD FOR REDUCING RESIST POISONING DURING PATTERNING OF SILICON N...
Publication number
20080081480
Publication date
Apr 3, 2008
Kai Frohberg
H01 - BASIC ELECTRIC ELEMENTS